ChE 571and ECE 511
Electronic Materials Processing

Page Contents

• Announcements
• Homework Assignments
• Lecture Handouts
• Additional Resources
• Classic Papers in IC Processing
• References and Course Reserves
• Syllabus
• Links

Announcements

1. Your graded HW#6 is available outside my office - 201 Gleeson (12/10)
2. Topic 14 handout posted (12/10)
3. HW #6 solution posted (12/4)
4. Topic 13 handout posted (12/2)
5. Topic 12 handout posted (11/30)
6. HW#6- posted (11/25)
7. Topic 11 handout posted (11/23)
8. HW #5 solution posted (11/20)
9. Topic 10 handout posted (11/20)
10. Topic 9 handout posted; topic 10 will be up in the morning (11/19)
11. Topic 8 handout posted (11/17)
12. A new "classic papers" section added (11/14)
13. HW #4 solution posted (11/13)
14. HW#5- posted (11/13)
15. Topic 7 handout posted in 2 parts plus 1 handout(11/10)
16. HW#4- posted (11/6)
17. Topic 6 handout posted (11/3)
18. HW #3b solution posted (10/30)
19. Midterm handed out (10/30)
20. HW #3 solution posted (10/23)
21. Topic 5 handout posted (10/22)
22. HW#3- problems 5 and 6 are due tuesday 10/28 (10/21)
23. Impingement flux derivation posted FYI ONLY (10/16)
24. HW #2 solution posted (10/16)
25. Pump handout- posted (10/16)
26. HW#3- posted (10/15)
27. Topic 2 handout updated (10/14)
28. Topic 4 handout posted (10/14)
29. HW#2 - problem 3 solve for Vg instead of Vp (10/10)
30. Topic 3 handout posted (10/9)
31. 10/14 lecture notes posted (10/9)
32. HW #1 solution posted (10/9)
33. 10/9 lecture notes posted (10/9)
34. HW#2- posted (10/9)
35. HW#1- Problem 2 calculate for Si (10/8)
36. HW#1 corrections (10/7):
    
    Problem 1 replace "MSFET" with "MOSFET"
    
    Problem 4 replace "holes" with "vacancies"

    CZ Model worksheet posted (10/6)

    HW 1 assignment posted (10/2)

    Topic 2 handout posted (10/1)

    Check here to see any additional handouts you will need for lecture (9/29)

Homework Assignments

Solutions (PDF) will be provided in this page after the date each homeworkassignment is due.

• HW#1: Due 10/9
  Solution


• HW#2: Due 10/16
  Solution
  problem4.pdf, problem5.pdf
  
  
• HW#3: Due 10/23
  Solution Part 1
  Solution Part 2
  
  
• HW#4: Due 11/13
  Solution


• HW#5: Due 11/20
  Solution


• HW#6: Due 12/4
  Solution

Lecture notes and Handouts

Additional Resources

1. Quiktime video of IBM factory
2. Bell-Lab's Si processing summary
3. Buffalo Applet on making a pn junction

Classic Papers

1. Gordon Moore's 1965 paper
   Click to obtain the origunal paper where he proposes Moore's Law
2. Grove's CVD model
   
3. Deal-Grove's Oxidation model
   

References and Course Reserves

• Useful references
• List of Books on Reserve and their call number

Syllabus

• General syllabus for course available here.
Outline of topics and reading assignments available here.

Links

• Movies of silicon wafer preparation at MEMC
• Interactive Applets on SemiconductorsA really cool site from Prof. C.R.Wie's group at SUNY at Buffalo. Mostly semiconductor physics but some processing stuff too
• Interactive tool for looking at MOS band structure and effects of biasing and oxide charge
• Lecture on Miller Indices, crystal directions and planes, and their calculation. See p. 24 for examples of calculating crystal dirctions and p. 34 for examples of calculating indices of crystal planes.