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E-mail Us: aaaaLindsey KatoaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaShawna Togiokaaaaaaaaaaaaaaaaaaaaaaaa aaaaaaaaaaaAvery Rose

Effect of Temperature on the Chemical Vapor Depostion Rate of &nbsp&nbsp&nbsp&nb Silicon Nitride

aaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaaA Senior Design Project

Our Objectives for this term are:

1. Determine the order of the depostion reaction by testing several specific concentrations of the reactants

2. Examine the effect of temperature on the growth rate of silicon nitride

3. Use obtained experimental data and the Arrehenius equation to find the activation energy of the silicon nitride depostion reaction

 

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Potential Problem Analysis Worksheet