The Effect of Ammonia Concentration and Reactor Temperature on the Deposition of Silicon Nitride on a Silicon Wafer
Our Team Members are:
Luke Sugie: Team Leader 
Erin Hadi: Operations Coordinator 
Arta Pecaj: Equipment Coordinator 
Carmen Adela Velasco: Safety Coordinator
Our Objective is:
Study the effect of the NH3 concentration and the operating temperature of the CVD reactor on the deposition rate of the Silicon Nitrate to the substrate.
Links of our Project