Electronic Material Processing

ECE/CHE 611 is held Tuesdays and Thursdays, 10:00 - 11:20am, in Gleeson 100.

The course textbook is: Silicon Processing for the VLSI Era, Vol. 1: Process Technology 2nd (second) Edition by Wolf, Stanley, Tauber, Richard N. [1999]


The course will be assessed as follows:

Assessment Percentage of Final Grade
Homework 30
Mid-Term Exam 25
Term Paper 20
Final Exam 25

Instructor Information

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