Welcome to ECE418/518 Semiconductor Device Processing – Spring 2017


Instructor: Mani Sivaramakrishnan

Class Hours: W, F: 16:00 – 17:50 Kidder 280

Office Hours: By Appointment

e-mail: sivarams@oregonstate.edu

TA(s):

Pedram Esfahani esfahanp@oregonstate.edu

Kamesh Mullapudi mullapus@oregonstate.edu

Michael Hayes hayesm@oregonstate.edu



Week1

Introduction

Introduction, Si_wafer_production

MOS Capacitor

Week2

Oxidation & SUPREM

Oxidation

Oxide characterization

Homework1

Homework 2

Week3

Diffusion

Diffusion

Week4

Ion implantation & Photo-lithography

Ion Implantation

Photolithography

Week 5

Film deposition and etching

Deposition

Etching

Weeks 6 - 9

MOS and Bipolar process integration

MOS Process Integration


Additional Reading Materials

Recent Advances

Beyond Moore's Law

Brattain's Lab notebook

First Transistor Press Release

For the curious

Quiz: How many Novel Prizes have been awarded in the field of Semiconductors so far?

Explore where the major fabs are located around the world and their production capabilities.


Quiz: MOS Capacitors